Atmosphere-Breathing Electric Propulsion (ABEP) is an international research focus. ABEP systems work in very low earth orbit (VLEO) can realize orbit maintenance of spacecrafts with little or no fuel. In this field, radio-frequency inductively coupled plasma (RF-ICP) thrusters can solve the problems of electrode corrosion and produce a dense plasma under thin atmosphere condition of VLEO. In this research, a RF-ICP source for the thruster configuration is designed, and a multi-physical coupling model is established. A complete simulation process is constructed to analyze the spatial distribution of the particles (e, N+, N2+, N, N2, N2S) in the RF-ICP. The results show that the particles in RF-ICP are axisymmetric in space, the electrons are mainly constrained in the central region of the ionization chamber by the magnetic field, and the plasma region expands and the electron density increases with the increase of the coil power. The other particles (N+, N2+, N, N2, N2S) are mainly distributed near the chamber wall as reactants or products of the surface reactions. And the distribution range of particles has a certain negative correlation with the electron energy required for excitation.
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