The discussion of evaluation in the education sector, that is the systematic assessment of organization structures, teaching and learning processes, and performance criteria aimed at quality improvement, has started in Germany much later than in other European countries. It can be stated that quality assurance activities in teaching become more and more significant in German universities. With regard to limiting public budgets also, evaluation of research programs and institutions are of growing importance. This paper gives a brief overview of the state of the art of evaluation procedures in the German science system. In order to better classify this information, the development and state of the art of evaluation in general in Germany is described first.