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A scanning probe microscope (SPM) technique has been used to investigate the material properties of self-assembled monolayers (SAMs) on gold. We demonstrate that SPM can achieve contactless detection of the thickness of SAMs. By measuring the reflection coefficient S11 at an operating frequency near 5.3 GHz, we could observe the thickness of SAMs. This nano-scale measurement of SAMs has a great potential for investigating the surface profile with high sensitivity.
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