Particles in a non-uniform electric field solution are subjected to dielectrophoresis, and the trajectory of particle movement is altered. This study is based on the principle of dielectrophoresis to design a device for the filtration of micro-particles of two different sizes that are in an AC electric field solution. Firstly, the two-dimensional plane structure of the filtration device is designed, and the filtration device model with coupled multi-physics fields is established by using the finite element analysis method. The electrode voltage magnitude, inlet flow rate, particle size, and particle conductivity in the model were analyzed and discussed to summarize the influencing factors that affect the filtration effect of micro-particles. The higher the electrode voltage of the filtration device, the greater the change in the trajectory of particle movement occurs, and it is difficult to achieve particle filtration when the electrode voltage is less than 5v. When the inlet flow rate increases the electrode voltage needs to be increased to achieve filtration of microparticles. When the flow rate of the filtration reaches 3000μm/s, it is difficult to filtration even when the voltage increases to 10V, so the suitable maximum flow rate of this device is 2000μm/s. The factors affecting particle manipulation are adjusted to improve the filtration effect of micro-particles, and this filtration device can filtration out larger size particles and leave smaller size particles.