Conformance Checking (CC) techniques enable us to gives the deviation between modelled behavior and actual execution behavior. The majority of organizations have Process-Aware Information Systems for recording the insights of the system. They have the process model to show how the process will be executed. The key intention of Process Mining is to extracting facts from the event log and used them for analysis, ratification, improvement, and redesigning of a process. Researchers have proposed various CC techniques for specific applications and process models. This paper has a detailed study of key concepts and contributions of Process Mining. It also helps in achieving business goals. The current challenges and opportunities in Process Mining are also discussed. The survey is based on CC techniques proposed by researchers with key objectives like quality parameters, perspective, algorithm types, tools, and achievements.