This paper proposes a new approach to recover 3-D shape from a SEM image. When SEM image is used to recover 3-D shape, one can apply the algorithm based on the solving the Eikonal equation with Fast Marching Method (FMM). However, when the vertical and oblique light source image is observed, the correct shape cannot be obtained by the usual one-pass FMM. The approach proposes a method to modify the original SEM image with intensity modification via neural network so that the correct 3-D shape could be obtained with FMM. The proposed approach is demonstrated through computer simulation and real experiment.
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